Micro- and Nano-fabrication of Stimulus-responsive Polymer using Nanoimprint Lithography
نویسندگان
چکیده
منابع مشابه
Resistless Fabrication of Nanoimprint Lithography (NIL) Stamps Using Nano-Stencil Lithography
In order to keep up with the advances in nano-fabrication, alternative, cost-efficient lithography techniques need to be implemented. Two of the most promising are nanoimprint lithography (NIL) and stencil lithography. We explore here the possibility of fabricating the stamp using stencil lithography, which has the potential for a cost reduction in some fabrication facilities. We show that the ...
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A simple process which utilizes a 2D stamp based on UV-NIL is proposed. The main idea is to control the cured region on the micrometer scale by using a developable resist. For the conventional UV-NIL process, a collimated UV light is transmitted through the transparent stamp to cure the overall resist as shown in Fig. S1a. However, if the size of the UV light is reduced, the cured region of the...
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Nanoimprint lithography (NIL) is a compelling technique for low cost nanoscale device fabrication. The precise and repeatable replication of nanoscale patterns from a single high resolution patterning step makes the NIL technique much more versatile than other expensive techniques such as e-beam or even helium ion beam lithography. Furthermore, the use of mechanical deformation during the NIL p...
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A significant amount of academic and industrial research efforts are devoted to the encapsulation of active substances within microor nanocarriers. The ultimate goal of core–shell systems is the protection of the encapsulated substance from the environment, and its controlled and targeted release. This can be accomplished by employing “stimuli-responsive” materials as constituents of the capsul...
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We present a simple process to fabricate gold nanocontacts with a gap as small as sub-10 nm. This method uses a two-step process of nanoimprint lithography ~NIL! and electromigration. First, 20 nm wide gold nanowires were fabricated by NIL on a silicon dioxide substrate. Then by passing an electric current through a nanowire, the nanowire is split into two wires with a gap as small as sub-10 nm...
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ژورنال
عنوان ژورنال: Journal of Photopolymer Science and Technology
سال: 2011
ISSN: 0914-9244,1349-6336
DOI: 10.2494/photopolymer.24.63